APRILIA DEWI ARDIYANTI; SIREGAR, A. C. P. .; TAMIMAH, N. . Characterization of RF Voltage and Self-Bias under Power Variations in 13.56 MHz RF Sputtering System. Faraday: Journal of Fundamental Physics, Research, and Applied Science, [S. l.], v. 1, n. 2, p. 47–51, 2025. DOI: 10.33005/faraday.v1i2.13. Disponível em: https://faraday.upnjatim.ac.id/index.php/faraday/article/view/13. Acesso em: 10 may. 2026.