Aprilia Dewi Ardiyanti, Siregar, A. C. P. ., & Tamimah, N. . (2025). Characterization of RF Voltage and Self-Bias under Power Variations in 13.56 MHz RF Sputtering System. Faraday: Journal of Fundamental Physics, Research, and Applied Science, 1(2), 47–51. https://doi.org/10.33005/faraday.v1i2.13